UICS™
(Universal Implant Control Software).
Replacement of supervision system for
NV4206 Implanter with an industrial PC
solution.
- Complete
Fluke controller 1722 replacement
- Design of Supervision Software.
Enhanced
Process control system for Ion
Implanters:
EPC™ for Eaton/Axcelis®
NV3204, NV4206, NV6200...
- INTOUCH™
Supervision system
- Self learning
touch screen system
- Complete
Fluke controller 1722 replacement
- Datalog
system
- Spectrum
Plots
- Maintenance
screen
Option
Communication with
Digital Terminal Controller, Interface
computer and beam monitor.
Enhanced
Control Command system for Ion
Implanters:
ECC™ for Varian®
DF4, CF300, 350D...
- Self Learning touch screen
system
- Industrial PC based system
- INTOUCH™
Supervision system
- Programmable Industrial
Automates
- Fiber optic based communication
- New pneumatic & vacuum system
- New electrical distribution
system
- New gas delivery system (cf.gas
box)
- New power supplies
Option
- S4™
Solid state scanning system
- R&D End station, heated & cooled
plate...