Refurbish & Upgrade

 


Our team of experts & former OEM engineers refurbish ion implanters to OEM performance specifications and are able to supply after sales support & warranty.

We cover the following implanter types:

Applied Materials®
  • 9200, 9500, 9500xr, xr200, xr80
Varian®
  • 350D, 300XP, E220, E500, E500HP, 80XP, 160XP, VIISion, VIIsta
Eaton/Axcelis®
  • NV3204, NV4206, NV6200, NV6200A, NV6200AV, NV10-80, NV10-160
  • NV8200, NV8250, GSD, GSDHE...

 

 
Standard Refurbishment program

 

  • Beam line reconditioning (tube, bushing...)
  • Source, Electrode, bushings reconditioning
  • Consumables replacement
  • Gas process distribution refurbishment (components & lines replacement)
  • vacuum system overhaul (Cryo, Mech, Diff pumps & Cryo compressor)
  • Electrical operational checks & repair
  • End station refurbishment (bearings replacement...)
  • Communication & Software control
  • CE Marking


Ion Implant Services
Please select an Ion Implant service that is of interest to you.
 

 
If there is a service related to Ion Implant that you require but is not listed here, please get in touch with us to discuss your requirements.

Contact us
  • Ion Implant A range of products & services available for your ion implanter.
  • Cryogenic Repair & exchange options for Cryopumps & Compressors.