Gas Box & Control

We are offering retrofit, upgrade or design gas boxes for io Implanters & supply process & after sales support & warranty.

Implanters Supported

Applied Materials®
  • 9200, 9500, 9500xr, xr200, xr80
Varian®
  • DF4, CF3000, 350D, 300XP, E220, E500, 160XP, VIISion...
Eaton/Axcelis®
  • NV3204, NV4206, NV6200, NV6200A, NV6200AV, NV10-80, NV10-160
  • NV8200, NV8250, GSD, GSDHE...



Special Product for Axcelis® Implanter


MIG™ Enhanced Gas Box

NV4206, Nv6200...

  • All gas distribution technologies integration SDS®, UPTIME™
  • Optimized bottle size & enhanced maintenance system
  • Complete interface with existing equipment digital control (fiber optic)

 

Option
  • Remote Gas Monitor system RGM™
  • Bottle level meter (for UPTIME™)
  • Liquid line

 


Special Product for Varian® Implanter


VIG™ Enhanced Gas Box

E220, E500...

  • All gas distribution technologies integration SDS®, UPTIME™
  • Optimized bottle size & enhanced maintenance system
  • Complete interface with existing equipment digital control (fiber optic)

 

Option
  • Remote Gas Monitor system RGM™
  • Bottle level meter (for UPTIME™)
  • Liquid line
  • 6 lines gas mixing

 
Ion Implant Services
Please select an Ion Implant service that is of interest to you.
 

 

 
If there is a service related to Ion Implant that you require but is not listed here, please get in touch with us to discuss your requirements.

Contact us
  • Ion Implant A range of products & services available for your ion implanter.
  • Cryogenic Repair & exchange options for Cryopumps & Compressors.