Research Chamber Modules  

R&D (Sur EATON Modules R&D (Sur EATON™ NV3204) 



Design Design Gyro Gyro+™ : Platen Platen 3 axes + 3 axes + heating heating + cooling cooling (unique and original design),

Source <<Sputtering>>

Deccel mode mode : low low energy energy (below below 2 keV)
 
 
   
   
 

 


 


Research Modules
Please select a service that is of interest to you.
 

 

We can work with you to design & manufacture custom design products for your equipment.

 


Services
  • Ion Implant A range of products & services available for your ion implanter.
  • Cryogenic Repair & exchange options for Cryopumps & Compressors.