Accelerator M50

Design Design and manufacturing of accelerator M50 


 
  • 1-50 keV simple charge
  • Double charge 100 keV double charge
  • Resolution M/ΔM > 1000
  • Range: 250 Mass Range: 250 a.m.u a.m.u. at 50 . at 50 Kev
  • 1E10 t 1E17 at/cm Dose Range : 1E10 t 1E17 at/cm²
  • Current max 1000 Beam Current max 1000µA
  • CE) Normes. CSA ( CE) Normes
 
 
 
 
 
 
 
 

 

 

 

 

  • High speed fiber optic link
  • 32 bits Processor
  • Up to 32 analog I/O (16 bits)
  • Up to 32 digital I/O
  • High reliability
  • Designed for process control (source & magnet area)
 

 

 


 


 


Products
Please select a service that is of interest to you.
 

 

We can work with you to design & manufacture custom design products for your equipment.


Services
  • Ion Implant A range of products & services available for your ion implanter.
  • Cryogenic Repair & exchange options for Cryopumps & Compressors.