300mm Research Chamber


 
 
Design and manufacturing of 300 mm extension (for Varian™ E500) 
 

Including Including : Beam Beam line and R&D line and R&D chamber 

 

 

 

 
 
 
  • Focalization X and Y , Scanning X and Y,
  • Digital Dose control, Implant parameters control
  • Large sample capabilities Up to 12 inches
  • Temperature on wafer measure system
  • Heated platen up to 700°C
  • Tilt up to 90 degrees,

 


 


 


Products
Please select a service that is of interest to you.
 

We can work with you to design & manufacture custom design products for your equipment.

 

We can work with you to design & manufacture custom design products for your equipment.


Contact us
  • Ion Implant A range of products & services available for your ion implanter.
  • Cryogenic Repair & exchange options for Cryopumps & Compressors.