OnBoard® Technical Data

 


On-Board® 4F


Pumping Speed - Litres/sec
Water Vapour 1100
Air: 370
Hydrogen: 370
Argon: 310
   
Cryo capacity - std litre
Argon: 210
Hydrogen (5x10-6 Torr): 3
Both stages: 1.3
Second Stage: 1
Weight (lbs): 70


Cryogenic Services
Please select a Cryopump type to view technical data.
 




  • Ion Implant A range of products & services available for your ion implanter.
  • Cryogenic Repair & exchange options for Cryopumps & Compressors.