Disks & Sites
Disk and sites for Ion Implanters standard
reconditioning, Silicon coating, parts
replacement…
- Complete
wheel refurbishment
- Hook Sites
- Pedestals
Highly advanced
tooling methods & materials
- Decontamination, surface refinishing
- Coating,
repair, upgrade
- Ultrasonic
cleaning
- Wheel
balancing to <1g at operating speed
Process
development and manufacturing of
elastomeric thermal interface pads for
wafer cooling or electrical charge
control
Protective
coatings used to shield hardware during
process
- Materials used are primarily high purity Silicon.
- The
deposition methods are by PVD or
Thermal spray transfer